Equipment performance | Equipment parameters | |
Equipment capacity (Full test UPH) | Open PR, bottom flying shot and post-solidification inspection 75K/H (depending on the solid crystal material) | |
Equipment accuracy | Position accuracy XY | ≤±15um |
Angular accuracy θ | ≤±1°(depending on the solid crystal material) | |
Device compatible product size | Length (L) size | Max 380mm |
Width (W) size | Max 220mm | |
Crystal ring size | 6 inch | |
Reading head resolution of crystal retrieval and crystal bonding platform | 0.5um | |
Compatible chip size | 2mil*4mil-40mil*40mil(0.05mm*0.1mm-1mm*1mm | |
Crystal taking pressure of Bond head swing arm | Adjustable 30g—250g | |
Swing arm nozzle rotation | ±180°Any angle die bonding | |
Image recognition system | Resolution | 720*540Pixel |
Grayscale | 256Grayscale | |
Image recognition accuracy | ±2.5um@50mil | |
Equipment appearance parameters | Dimensions (excluding display, tricolor light & FFU) | 1480mm(L)*2060mm(W)*1800(H)mm |
Track height (from ground level) | 900mm±30mm | |
weight | 1800kg*3 | |
Equipment electrical parameters | Voltage/Frequency | 220V/50Hz |
Rated Power | 2.2KW | |
Using Compressed Air | 0.5Mpa(Min) | |
Gas consumption | 20L/Min |